LLC VTT: VTT-700-OPTIK optical coating deposition unit

231042, Republic of Belarus, Smorgon, Ya. Kolas passage 4.

Tel. +37529 6154641

Tel/fax +3751592-4-12-90

E-mail: VACTT@MAIL.RU ; VS200362@LIST.RU

Let out production:

Standard equipment configuration. Chamber diameter is 700 mm. Forevacuum pumping is based on two mechanical pumps. The first stage is a vane rotary pump with a capacity of 90 m3/h. The second stage is a Roots pump with a capacity of 280 m3/h. High-vacuum pumping is organized on a cryogenic pump, the pumping speed for nitrogen is 5500 l/s. A spiral pump is installed for regeneration, the pumping speed is 12.5 m3/h. INFICON sensors are installed in the equipment to control the vacuum. The unit is equipped with one resistive and two electron-beam evaporators VTT-6 of our own production. The HCS-3000 ion source is used to clean the products and assist the coating during the spraying process. To control the speed and thickness of the deposited film, the unit is equipped with the SQC 310 quartz control system.

Online address: www.vacuumtt.ru/index.php/vypuskaemoe-oborudovanie/55-vakuumnaya-ustanovka-vtt-700-optik

Purpose: Sputtering of high-quality multilayer optical coatings for the visible, infrared and ultraviolet ranges. On a vacuum unit of this model, it is possible to spray filters of various configurations, anti-reflective coatings, mirror coatings, coatings that increase the reflection coefficient. The unit can be equipped with other pumping means upon agreement with the consumer. It is possible to install upper heating elements. For spraying specialized parts and obtaining higher uniformity on the products, it is possible to install planetary equipment. It is possible to install a control system for spraying conductive coatings using a control sample installed in a dome with the products being sprayed. To heat the products during the spraying process, lower heating with infrared lamp heaters is used.